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Residual Stress Mapping in TiN Coatings by Nanoindentation Technique

Titanium nitride (TiN) coatings were deposited on American Iron and Steel Institute (AISI) 410 stainless steel substrates by the cathodic arc physical vapor deposition process, varying the substrate bias voltage from 0 to 300 V. The residual stress in TiN coatings was measured using two different nondestructive testing techniques: grazing incidence X-ray diffraction (GIXRD) and nanoindentation. Classic GIXRD is used to determine the nature of residual stress. According to the macro-residual stress results, the continuous nanoindentation technique was used to estimate the residual stress distribution along the surface with accuracy in the nanometer range. The compressive stress was observed by the shift in load-depth curves. A previously developed methodology was used to map the residual stress at different nano-penetration depths. The presence of stress gradients was explained based on the mechanisms of stress generation.

Abadiasa, G. and P. Guerin, “In Situ Stress Evolution during Magnetron Sputtering of Transition Metal Nitride Thin Films,” Applied Physics Letters, Vol. 93, No. 11, 2008, pp. 111908–111910. Ahlgren M. and H. Blomqvist, “Influence of Bias Variation on Residual Stress and Texture in TiAlN PVD Coatings,” Surface and Coatings Technology, Vol. 200, Nos. 1–4, 2005, pp. 157–160. Benegra, M., D.G. Lamas, M.E. Fernández de Rapp, N. Mingolo, A.O. Kunrath and R.M. Souza, “Residual Stresses in Titanium Nitride Thin Films Deposited by Direct Current and Pulsed Direct Current Unbalanced Magnetron Sputtering,” Thin Solid Films, Vol. 494, Nos. 1–2, 2006, pp. 146–150. Bolshakov, A., W.C. Oliver and G.M. Pharr, “Influences of Stress on the Measurement of Mechanical Properties using Nanoindentation: Part II. Finite Element Simulations,” Journal of Materials Research, Vol. 11, No. 3, 1996, pp. 760–768. Carlsson S. and P.-L. Larsson, “On the Determination of Residual Stress and Strain Fields by Sharp Indentation Testing. Part I: Theoretical and Numerical Analysis,” Acta Materialia, Vol. 49, No. 12, 2001, pp. 2179–2191. Carrasco, C.A., V. Vergara, R. Benavente, N. Mingolo and J.C. Ríos, “The Relationship between Residual Stress and Process Parameters in TiN Coatings on Copper Alloy Substrates,” Materials Characterization, Vol. 48, No. 1, 2002, pp. 81–88. Dobrzański, L.A., S. Skrzypek, D. Pakuła, J. Mikuła and A. Křiž, “Influence of the PVD and CVD Technologies on the Residual Macrostresses and Functional Properties of the Coated Tool Ceramics,” Journal of Achievements in Materials and Manufacturing Engineering, Vol. 35, No. 2, 2009, pp. 162–168. Haanappel, V.A.C., D. van de Vendel, H.S.C. Metselaar, H.D. van Corbach, T. Fransen and P.J. Gellings, “The Mechanical Properties of Thin Alumina Films Deposited by Metal-organic Chemical Vapor Deposition,” Thin Solid Films, Vol. 254, Nos. 1–2, 1995, pp. 153–163. Hamzah, E., M. Ali and M.R. Mohd Toff, “Effect of Substrate Bias on Friction Coefficient, Adhesion Strength and Hardness of TiN-coated Tool Steel,” Surface Review and Letters, Vol. 13, No. 6, 2006, pp. 763–771. Cullity, B.D., Elements of X-ray Diffraction, Addison-Wesley Publishing Company, Inc., Boston, Massachusetts, 1956. Larsson, P., “On the Mechanical Behavior at Sharp Indentation of Materials with Compressive Residual Stresses,” Materials & Design, Vol. 32, No. 3, 2011, pp. 1427–1434. Lee, J., C. Lee and B. Kim, “Reverse Analysis of Nano-indentation using Different Representative Strains and Residual Indentation Profiles,” Materials & Design, Vol. 30, No. 9, 2009, pp. 3395–3404. Lee Y. and D. Kwon, “Estimation of Biaxial Surface Stress by Instrumented Indentation with Sharp Indenters,” Acta Materialia, Vol. 52, No. 6, 2004, pp. 1555–1563. Luo, Q. and A.H. Jones, “High-precision Determination of Residual Stress of Polycrystalline Coatings using Optimized XRD-sin2ψ Technique,” Surface and Coatings Technology, Vol. 205, No. 5, 2010, pp. 1403–1408. Marques, M.J., A.M. Dias, P. Gergaud and J.L. Lebrun, “A Methodology Development for the Study of Near Surface Stress Gradients,” Materials Science and Engineering A, Vol. 287 No. 1, 2000, pp. 78–86. Perry, A.J. and D.E. Geist, “Profiling the Residual Stress and Integral Strain Distribution in Yttrium Implanted Titanium Nitride,” Vacuum, Vol. 48, No. 10, 1997, pp. 833–838. Quaeyhaegens, C., G. Knuyt and L.M. Stals, “Residual Macroscopic Stress in Highly Preferentially Oriented Titanium Nitride Coatings Deposited on Various Steel Types,” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 14, No. 4, 1996, pp. 2462–2469. Suresh S. and E. Giannakopoulos, “A New Method for Estimating Residual Stresses by Instrumented Sharp Indentation,” Acta Materialia, Vol. 46, No. 16, 1998, pp. 5755–5767. Tsui, T.Y., W.C. Oliver and G.M. Pharr, “Influences of Stress on the Measurement of Mechanical Properties using Nanoindentation: Part I. Experimental Studies in an Aluminum Alloy,” Journal of Materials Research, Vol. 11, No., 3, pp. 752–759. Ushakov, A.V., V.E. Red’kin, S. M. Zharkov and L.A. Solov’ev, “Effect of Gas Pressure on the Properties of Electric-arc Titanium Nitride Powders,” Inorganic Materials, Vol. 39, No. 3., 2003, pp. 271–275. Vaz, F., P. Cerqueira, L. Rebouta, S.M.C. Nascimento, E. Alves, P. Goudeau, J.P. Rivière, K. Pischow and J. de Rijk, “Structural, Optical and Mechanical Properties of Colored TiNxOyThin Films,” Thin Solid Films,Vols. 447–448, January 2004, pp. 449–454. Yamamoto S. and H. Ichimura, “Effect of Substrate Bias Voltage on the Properties of Arc Ion-plated TiN Films onto High Speed Steels,” Journal of Materials Research, Vol. 11, No. 5, 1996, pp. 1149–1156. Zhu, L., B. Xu, H. Wang and C. Wang “Measurement of Residual Stress in Quenched 1045 Steel by the Nanoindentation Method,” Materials Characterization, Vol. 61, No. 12, 2010, pp. 1359–1362.
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