Micro-ACFM Sensors for Surface Crack Sizing

The purpose of this study is to explore the possibility of using an integrated Hall probe for the realisation of a miniaturized crack detector with superior crack depth sizing capabilities. Such miniaturization would allow the probe to be easily carried by a highly compact inspection robot and allow for the assessment of metallic structures that are diff cult to access. The focus is on surface breaking cracks in conductive metals around 2 mm deep that should be sized with an absolute accuracy of 0.1 mm. The developed sensor concept should be insensible to the crack’s shape and width, reliably measuring its true depth. The proposed solution combines eddy current testing with flux leakage detection, an approach that seems to be particularly suited for micro CMOS Hall devices. It will be shown that the sensor concept is capable of detection the crack size with the required resolution and that its output is not function of the crack width or shape.

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