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A Breakthrough in Phased Array Target Inspection: Ultra-high Speed Scanning with Volume Focusing

In the manufacturing industry, more and more plate parts have to be inspected to detect small flaws. As the rate of manufacturing increases, new and innovative inspection methods are required. This paper presents a method and the results that have been applied on target inspections that are used for display manufacturing. The l aws are either inclusions or disbondings, in the range of 0.5 mm diameter, or thin slits in the range of 5 µm by 5 mm long. Over the years, the technique shifted from single element probes with high speed mechanical scanners to a conventional phased array technique with electronic scanning permitting an increase in productivity by a factor of more than 4. The method described here represents a new break through using volume focusing allowing additional inspection speed gains of at least 4.

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